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Laser Heat-Mode Lithography

- Principle and Methods

Bag om Laser Heat-Mode Lithography

This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9789811509421
  • Indbinding:
  • Hardback
  • Sideantal:
  • 208
  • Udgivet:
  • 29. November 2019
  • Udgave:
  • 12019
  • Størrelse:
  • 155x235x0 mm.
  • Vægt:
  • 506 g.
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Leveringstid: 2-3 uger
Forventet levering: 16. April 2024

Beskrivelse af Laser Heat-Mode Lithography

This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.

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