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Focuses on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, and electronic components for high frequency communications.
The problem solving edition "Piezoelectric Actuators -Problem Solving" was also published through Morikita, which was sold in conjunction with a 60 minute video tape to provide easy understanding.
KLUWER Academic Publishers has thus rightly identified "Materials for Optoelectronics" as a good opportunity for a book in the series entitled "Electronic Materials;
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