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Electroceramic-Based MEMS

- Fabrication-Technology and Applications

Bag om Electroceramic-Based MEMS

Focuses on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, and electronic components for high frequency communications.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780387233109
  • Indbinding:
  • Hardback
  • Sideantal:
  • 414
  • Udgivet:
  • 3. Marts 2005
  • Udgave:
  • 2005
  • Størrelse:
  • 234x156x23 mm.
  • Vægt:
  • 1710 g.
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Leveringstid: 8-11 hverdage
Forventet levering: 9. Oktober 2024

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Focuses on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, and electronic components for high frequency communications.

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