Bøger i MEMS Reference Shelf serien

This book focuses on the reliability and manufacturability of MEMS at a fundamental level. It demonstrates how to design MEMs for reliability and provides detailed information on the different types of failure modes and how to avoid them.

Here, the author builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage.

The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.

This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics.

The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.

This detailed book provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes. It introduces structural designs that provide inherent robustness against structural and environmental variations.

This book addresses Lab-on-a-Chip devices. It focuses on microfluidic technologies that have emerged in the past decade. Coverage presents a comprehensive listing of the most promising microfluidic technologies in the Lab-on-a-Chip field. It also details technologies that can be viewed as toolboxes needed to set up complex Lab-on-a-Chip systems.

This book addresses Lab-on-a-Chip devices. It focuses on microfluidic technologies that have emerged in the past decade. Coverage presents a comprehensive listing of the most promising microfluidic technologies in the Lab-on-a-Chip field. It also details technologies that can be viewed as toolboxes needed to set up complex Lab-on-a-Chip systems.

This book explains biosensor development fundamentals. It also initiates awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, homeland security, environmental needs, and disease identification.

This book describes high energy density microbatteries required for compact long lifetime wireless sensor microsystems. It also presents theories employing high energy density radioisotope thin films in actuating novel electromechanical energy converters.

This book reviews state-of-the-art Silicon Carbide (SiC) technologies. It includes reviews of MEMS devices and provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.

This book explains biosensor development fundamentals. It also initiates awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, homeland security, environmental needs, and disease identification.

MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing.