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Photonic Microsystems

- Micro and Nanotechnology Applied to Optical Devices and Systems

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This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780387290225
  • Indbinding:
  • Hardback
  • Sideantal:
  • 632
  • Udgivet:
  • 2. December 2008
  • Størrelse:
  • 235x155x34 mm.
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This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics.

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