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This text, the standard of the field, includes an overview of such topics as the theory of image and contrast formation as well as discussion of recent progress in the field, especially in the areas of aberration corrector and energy filtering.
The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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