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Fundamental Principles of Optical Lithography

- The Science of Microfabrication

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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780470018934
  • Indbinding:
  • Hardback
  • Sideantal:
  • 544
  • Udgivet:
  • 16. November 2007
  • Størrelse:
  • 171x249x37 mm.
  • Vægt:
  • 1140 g.
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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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