Udvidet returret til d. 31. januar 2025

Handbook for Cleaning for Semiconductor Manufacturing

- Fundamentals and Applications

Bag om Handbook for Cleaning for Semiconductor Manufacturing

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780470625958
  • Indbinding:
  • Hardback
  • Sideantal:
  • 614
  • Udgivet:
  • 4. februar 2011
  • Størrelse:
  • 263x185x43 mm.
  • Vægt:
  • 1276 g.
  • BLACK NOVEMBER
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Leveringstid: 2-3 uger
Forventet levering: 11. december 2024

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This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

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