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Ion Implantation in Microelectronics

- A Comprehensive Bibliography

Bag om Ion Implantation in Microelectronics

During the past ten years the use of ion implantation for doping semiconductors has become an active area of research and new device development. The main sources searched were: Physics Abstracts (PA) , Electrical and Electronics Abstracts (EEA) , Chemical Abstracts (CA) , Nuclear Science Abstracts (NSA) , and Engineering Index.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781468461343
  • Indbinding:
  • Paperback
  • Sideantal:
  • 266
  • Udgivet:
  • 18. maj 2012
  • Udgave:
  • 11981
  • Størrelse:
  • 254x178x14 mm.
  • Vægt:
  • 515 g.
  • BLACK NOVEMBER
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Leveringstid: 8-11 hverdage
Forventet levering: 7. december 2024

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During the past ten years the use of ion implantation for doping semiconductors has become an active area of research and new device development. The main sources searched were: Physics Abstracts (PA) , Electrical and Electronics Abstracts (EEA) , Chemical Abstracts (CA) , Nuclear Science Abstracts (NSA) , and Engineering Index.

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