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Low Dielectric Constant Materials for IC Applications

Bag om Low Dielectric Constant Materials for IC Applications

Low dielectric constant materials are an important component of microelectronic devices. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783540678199
  • Indbinding:
  • Hardback
  • Sideantal:
  • 310
  • Udgivet:
  • 14. november 2002
  • Udgave:
  • 2003
  • Størrelse:
  • 234x156x19 mm.
  • Vægt:
  • 1430 g.
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Leveringstid: 8-11 hverdage
Forventet levering: 18. januar 2025

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Low dielectric constant materials are an important component of microelectronic devices. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability.

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