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Low Pressure Plasmas and Microstructuring Technology

Bag om Low Pressure Plasmas and Microstructuring Technology

Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783642099397
  • Indbinding:
  • Paperback
  • Sideantal:
  • 732
  • Udgivet:
  • 19. oktober 2010
  • Udgave:
  • 12009
  • Størrelse:
  • 234x156x38 mm.
  • Vægt:
  • 1139 g.
  • BLACK NOVEMBER
  Gratis fragt
Leveringstid: 8-11 hverdage
Forventet levering: 27. november 2024

Beskrivelse af Low Pressure Plasmas and Microstructuring Technology

Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

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