Udvidet returret til d. 31. januar 2025

Materials & Process Integration for MEMS

Bag om Materials & Process Integration for MEMS

Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.

Vis mere
  • Sprog:
  • Engelsk
  • ISBN:
  • 9781402071751
  • Indbinding:
  • Hardback
  • Sideantal:
  • 299
  • Udgivet:
  • 1. august 2002
  • Udgave:
  • 2002
  • Størrelse:
  • 235x155x19 mm.
  • Vægt:
  • 1400 g.
  • BLACK NOVEMBER
  Gratis fragt
Leveringstid: 8-11 hverdage
Forventet levering: 27. november 2024

Beskrivelse af Materials & Process Integration for MEMS

Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.

Brugerbedømmelser af Materials & Process Integration for MEMS



Find lignende bøger
Bogen Materials & Process Integration for MEMS findes i følgende kategorier:

Gør som tusindvis af andre bogelskere

Tilmeld dig nyhedsbrevet og få gode tilbud og inspiration til din næste læsning.