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Materials & Process Integration for MEMS

Bag om Materials & Process Integration for MEMS

Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781402071751
  • Indbinding:
  • Hardback
  • Sideantal:
  • 299
  • Udgivet:
  • 1. August 2002
  • Udgave:
  • 2002
  • Størrelse:
  • 235x155x19 mm.
  • Vægt:
  • 1400 g.
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Leveringstid: 8-11 hverdage
Forventet levering: 8. Oktober 2024

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Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.

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