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material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
Germanium is a semiconductor material that formed the basis for the development of transistor technology. This book aims to provide an in-depth coverage of the field, including various advances in Ge-technology and the fundamentals in material science, device physics and semiconductor processing.
The first part of this overview on extended defects in Germanium covers fundamentals, describing crystallographic structure and other physical and electrical properties. The second part treats the extended defects during wafer and device processing.
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