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Modelling of Microfabrication Systems

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783540002529
  • Indbinding:
  • Hardback
  • Sideantal:
  • 270
  • Udgivet:
  • 13. juni 2003
  • Udgave:
  • 2003
  • Størrelse:
  • 234x156x17 mm.
  • Vægt:
  • 1270 g.
  • BLACK WEEK
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Leveringstid: 8-11 hverdage
Forventet levering: 13. december 2024
Forlænget returret til d. 31. januar 2025

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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