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Modelling of Microfabrication Systems

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783642055362
  • Indbinding:
  • Paperback
  • Sideantal:
  • 270
  • Udgivet:
  • 7. december 2010
  • Udgave:
  • 12003
  • Størrelse:
  • 234x156x14 mm.
  • Vægt:
  • 433 g.
  • BLACK WEEK
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Leveringstid: 8-11 hverdage
Forventet levering: 10. december 2024

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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